TY  - JOUR
AU  - Petrović, Z. Lj.
AU  - Dujko, S.
AU  - Marić, D.
AU  - Malović, G.
AU  - Nikitović, Željka D.
AU  - Sasić, O.
AU  - Jovanović, Jasmina
AU  - Stojanović, Vladimir D.
AU  - Radmilović-Radenović, M.
PY  - 2009
UR  - https://machinery.mas.bg.ac.rs/handle/123456789/938
AB  - In this review paper, we discuss the current status of the physics of charged particle swarms, mainly electrons, having plasma modelling in mind. The measurements of the swarm coefficients and the availability of the data are briefly discussed. We try to give a summary of the past ten years and cite the main reviews and databases, which store the majority of the earlier work. The need for reinitiating the swarm experiments and where and how those would be useful is pointed out. We also add some guidance on how to find information on ions and fast neutrals. Most space is devoted to interpretation of transport data, analysis of kinetic phenomena, and accuracy of calculation and proper use of transport data in plasma models. We have tried to show which aspects of kinetic theory developed for swarm physics and which segments of data would be important for further improvement of plasma models. Finally, several examples are given where actual models are mostly based on the physics of swarms and those include Townsend discharges, afterglows, breakdown and some atmospheric phenomena. Finally we stress that, while complex, some of the results from the kinetic theory of swarms and the related phenomenology must be used either to test the plasma models or even to bring in new physics or higher accuracy and reliability to the models.
PB  - IOP Publishing Ltd, Bristol
T2  - Journal of Physics D-Applied Physics
T1  - Measurement and interpretation of swarm parameters and their application in plasma modelling
IS  - 19
VL  - 42
DO  - 10.1088/0022-3727/42/19/194002
ER  - 

@article{
author = "Petrović, Z. Lj. and Dujko, S. and Marić, D. and Malović, G. and Nikitović, Željka D. and Sasić, O. and Jovanović, Jasmina and Stojanović, Vladimir D. and Radmilović-Radenović, M.",
year = "2009",
abstract = "In this review paper, we discuss the current status of the physics of charged particle swarms, mainly electrons, having plasma modelling in mind. The measurements of the swarm coefficients and the availability of the data are briefly discussed. We try to give a summary of the past ten years and cite the main reviews and databases, which store the majority of the earlier work. The need for reinitiating the swarm experiments and where and how those would be useful is pointed out. We also add some guidance on how to find information on ions and fast neutrals. Most space is devoted to interpretation of transport data, analysis of kinetic phenomena, and accuracy of calculation and proper use of transport data in plasma models. We have tried to show which aspects of kinetic theory developed for swarm physics and which segments of data would be important for further improvement of plasma models. Finally, several examples are given where actual models are mostly based on the physics of swarms and those include Townsend discharges, afterglows, breakdown and some atmospheric phenomena. Finally we stress that, while complex, some of the results from the kinetic theory of swarms and the related phenomenology must be used either to test the plasma models or even to bring in new physics or higher accuracy and reliability to the models.",
publisher = "IOP Publishing Ltd, Bristol",
journal = "Journal of Physics D-Applied Physics",
title = "Measurement and interpretation of swarm parameters and their application in plasma modelling",
number = "19",
volume = "42",
doi = "10.1088/0022-3727/42/19/194002"
}

Petrović, Z. Lj., Dujko, S., Marić, D., Malović, G., Nikitović, Ž. D., Sasić, O., Jovanović, J., Stojanović, V. D.,& Radmilović-Radenović, M.. (2009). Measurement and interpretation of swarm parameters and their application in plasma modelling. in Journal of Physics D-Applied Physics
IOP Publishing Ltd, Bristol., 42(19).
https://doi.org/10.1088/0022-3727/42/19/194002

Petrović ZL, Dujko S, Marić D, Malović G, Nikitović ŽD, Sasić O, Jovanović J, Stojanović VD, Radmilović-Radenović M. Measurement and interpretation of swarm parameters and their application in plasma modelling. in Journal of Physics D-Applied Physics. 2009;42(19).
doi:10.1088/0022-3727/42/19/194002 .

Petrović, Z. Lj., Dujko, S., Marić, D., Malović, G., Nikitović, Željka D., Sasić, O., Jovanović, Jasmina, Stojanović, Vladimir D., Radmilović-Radenović, M., "Measurement and interpretation of swarm parameters and their application in plasma modelling" in Journal of Physics D-Applied Physics, 42, no. 19 (2009),
https://doi.org/10.1088/0022-3727/42/19/194002 . .

TY  - JOUR
AU  - Petrović, Z. Lj.
AU  - Raspopović, Zoran M.
AU  - Stojanović, Vladimir D.
AU  - Jovanović, Jasmina
AU  - Malović, G.
AU  - Makabe, T.
AU  - de Urquijo, J.
PY  - 2007
UR  - https://machinery.mas.bg.ac.rs/handle/123456789/731
AB  - We review techniques to prepare, evaluate and apply sets of cross section and transport data for negative ions that are required for the modeling of collisional non-equilibrium plasmas used for processing of microelectronic circuits. We collect and discuss the transport coefficients and cross section sets. We have compiled data for negative ions in CF4 and CF4-related negative ions in rare gases. In addition, we consider data for F- and CF3- in rare gases. Furthermore, we analyze the cross sections of halogen negative ions in rare gases and other molecules. This is followed by the data for SF6 related ions in SF6 and in rare gases. The cross section for scattering of O- in O-2 has been derived from the transport data and used to make calculations of the transport properties. Finally we give a brief discussion of the availability of the data for H- ions in H-2. We have derived cross sections in several cases but the basic aim is to show the basic features of transport coefficients. In particular we discuss the need to represent properly some details such as the non-conservative nature of transport coefficients and the anisotropy of diffusion. Application of approximate theories and representations of cross sections are also discussed.
PB  - Elsevier, Amsterdam
T2  - Applied Surface Science
T1  - Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies
EP  - 6640
IS  - 16
SP  - 6619
VL  - 253
DO  - 10.1016/j.apsusc.2007.02.005
ER  - 

@article{
author = "Petrović, Z. Lj. and Raspopović, Zoran M. and Stojanović, Vladimir D. and Jovanović, Jasmina and Malović, G. and Makabe, T. and de Urquijo, J.",
year = "2007",
abstract = "We review techniques to prepare, evaluate and apply sets of cross section and transport data for negative ions that are required for the modeling of collisional non-equilibrium plasmas used for processing of microelectronic circuits. We collect and discuss the transport coefficients and cross section sets. We have compiled data for negative ions in CF4 and CF4-related negative ions in rare gases. In addition, we consider data for F- and CF3- in rare gases. Furthermore, we analyze the cross sections of halogen negative ions in rare gases and other molecules. This is followed by the data for SF6 related ions in SF6 and in rare gases. The cross section for scattering of O- in O-2 has been derived from the transport data and used to make calculations of the transport properties. Finally we give a brief discussion of the availability of the data for H- ions in H-2. We have derived cross sections in several cases but the basic aim is to show the basic features of transport coefficients. In particular we discuss the need to represent properly some details such as the non-conservative nature of transport coefficients and the anisotropy of diffusion. Application of approximate theories and representations of cross sections are also discussed.",
publisher = "Elsevier, Amsterdam",
journal = "Applied Surface Science",
title = "Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies",
pages = "6640-6619",
number = "16",
volume = "253",
doi = "10.1016/j.apsusc.2007.02.005"
}

Petrović, Z. Lj., Raspopović, Z. M., Stojanović, V. D., Jovanović, J., Malović, G., Makabe, T.,& de Urquijo, J.. (2007). Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies. in Applied Surface Science
Elsevier, Amsterdam., 253(16), 6619-6640.
https://doi.org/10.1016/j.apsusc.2007.02.005

Petrović ZL, Raspopović ZM, Stojanović VD, Jovanović J, Malović G, Makabe T, de Urquijo J. Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies. in Applied Surface Science. 2007;253(16):6619-6640.
doi:10.1016/j.apsusc.2007.02.005 .

Petrović, Z. Lj., Raspopović, Zoran M., Stojanović, Vladimir D., Jovanović, Jasmina, Malović, G., Makabe, T., de Urquijo, J., "Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies" in Applied Surface Science, 253, no. 16 (2007):6619-6640,
https://doi.org/10.1016/j.apsusc.2007.02.005 . .

TY  - JOUR
AU  - Petrović, Z. Lj.
AU  - Suvakov, M.
AU  - Nikitović, Željka D.
AU  - Dujko, S.
AU  - Sasić, O.
AU  - Jovanović, Jasmina
AU  - Malović, G.
AU  - Stojanović, Vladimir D.
PY  - 2007
UR  - https://machinery.mas.bg.ac.rs/handle/123456789/710
AB  - In this review we discuss the current status of the physics of charged particle swarms, mainly electrons. The whole field is analysed mainly through its relationship to plasma modelling and illustrated by some recent examples developed mainly by our group. The measurements of the swarm coefficients and the availability of the data are briefly discussed. More time is devoted to the development of complete electron - molecule cross section sets along with recent examples such as NO, CF4 and HBr. We extend the discussion to the availability of ion and fast neutral data and how swarm experiments may serve to provide new data. As a point where new insight into the kinetics of charge particle transport is provided, the role of kinetic phenomena is discussed and recent examples are listed. We focus here on giving two examples on how non-conservative processes make dramatic effects in transport, the negative absolute mobility and the negative differential conductivity for positrons in argon. Finally we discuss the applicability of swarm data in plasma modelling and the relationship to other fields where swarm experiments and analysis make significant contributions.
PB  - IOP Publishing Ltd, Bristol
T2  - Plasma Sources Science & Technology
T1  - Kinetic phenomena in charged particle transport in gases, swarm parameters and cross section data
EP  - S12
IS  - 1
SP  - S1
VL  - 16
DO  - 10.1088/0963-0252/16/1/S01
ER  - 

@article{
author = "Petrović, Z. Lj. and Suvakov, M. and Nikitović, Željka D. and Dujko, S. and Sasić, O. and Jovanović, Jasmina and Malović, G. and Stojanović, Vladimir D.",
year = "2007",
abstract = "In this review we discuss the current status of the physics of charged particle swarms, mainly electrons. The whole field is analysed mainly through its relationship to plasma modelling and illustrated by some recent examples developed mainly by our group. The measurements of the swarm coefficients and the availability of the data are briefly discussed. More time is devoted to the development of complete electron - molecule cross section sets along with recent examples such as NO, CF4 and HBr. We extend the discussion to the availability of ion and fast neutral data and how swarm experiments may serve to provide new data. As a point where new insight into the kinetics of charge particle transport is provided, the role of kinetic phenomena is discussed and recent examples are listed. We focus here on giving two examples on how non-conservative processes make dramatic effects in transport, the negative absolute mobility and the negative differential conductivity for positrons in argon. Finally we discuss the applicability of swarm data in plasma modelling and the relationship to other fields where swarm experiments and analysis make significant contributions.",
publisher = "IOP Publishing Ltd, Bristol",
journal = "Plasma Sources Science & Technology",
title = "Kinetic phenomena in charged particle transport in gases, swarm parameters and cross section data",
pages = "S12-S1",
number = "1",
volume = "16",
doi = "10.1088/0963-0252/16/1/S01"
}

Petrović, Z. Lj., Suvakov, M., Nikitović, Ž. D., Dujko, S., Sasić, O., Jovanović, J., Malović, G.,& Stojanović, V. D.. (2007). Kinetic phenomena in charged particle transport in gases, swarm parameters and cross section data. in Plasma Sources Science & Technology
IOP Publishing Ltd, Bristol., 16(1), S1-S12.
https://doi.org/10.1088/0963-0252/16/1/S01

Petrović ZL, Suvakov M, Nikitović ŽD, Dujko S, Sasić O, Jovanović J, Malović G, Stojanović VD. Kinetic phenomena in charged particle transport in gases, swarm parameters and cross section data. in Plasma Sources Science & Technology. 2007;16(1):S1-S12.
doi:10.1088/0963-0252/16/1/S01 .

Petrović, Z. Lj., Suvakov, M., Nikitović, Željka D., Dujko, S., Sasić, O., Jovanović, Jasmina, Malović, G., Stojanović, Vladimir D., "Kinetic phenomena in charged particle transport in gases, swarm parameters and cross section data" in Plasma Sources Science & Technology, 16, no. 1 (2007):S1-S12,
https://doi.org/10.1088/0963-0252/16/1/S01 . .