Review of the article “Micro Fourier transform infrared spectrometer based on an electrothermal MEMS mirror”, verified by Publons, Web of Science
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2018
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Abstract: This paper presents a micro Fourier transform infrared
spectrometer (μFTIR), enabled by an innovative H-shaped electrothermal
microelectromechanical systems (MEMS) mirror. The H-shaped MEMS
mirror consists of 32 symmetrically-distributed three-level ladder bi-layer
actuators, leading to large linear displacement with negligible tilting. A
special driving method was developed for obtaining a linear, uniform-speed
motion of 186 μm and the tilting angle of the MEMS mirror was as small as
0.06°, so there was no need of complex closed-loop control. A telecentric
lens was employed in the interferometer of the μFTIR to reduce the
influence of the MEMS mirror tilting effect. Also, a new phase interpolation
algorithm, instead of the traditional fringe interval method, was applied in
the process of the spectral reconstruction to improve the spectral stability.
Finally, the new μFTIR was applied in the composition prediction of
soybeans, and the experimental results show th...at it can accurately measure
grain moisture, protein and fat contents.
Izvor:
Optics Express, 2018, 1/326828-10Kolekcije
Institucija/grupa
Mašinski fakultetTY - JOUR AU - Jovanović, Tamara PY - 2018 UR - https://machinery.mas.bg.ac.rs/handle/123456789/6184 AB - Abstract: This paper presents a micro Fourier transform infrared spectrometer (μFTIR), enabled by an innovative H-shaped electrothermal microelectromechanical systems (MEMS) mirror. The H-shaped MEMS mirror consists of 32 symmetrically-distributed three-level ladder bi-layer actuators, leading to large linear displacement with negligible tilting. A special driving method was developed for obtaining a linear, uniform-speed motion of 186 μm and the tilting angle of the MEMS mirror was as small as 0.06°, so there was no need of complex closed-loop control. A telecentric lens was employed in the interferometer of the μFTIR to reduce the influence of the MEMS mirror tilting effect. Also, a new phase interpolation algorithm, instead of the traditional fringe interval method, was applied in the process of the spectral reconstruction to improve the spectral stability. Finally, the new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure grain moisture, protein and fat contents. T2 - Optics Express T1 - Review of the article “Micro Fourier transform infrared spectrometer based on an electrothermal MEMS mirror”, verified by Publons, Web of Science EP - 10 SP - 1/326828 UR - https://hdl.handle.net/21.15107/rcub_machinery_6184 ER -
@article{ author = "Jovanović, Tamara", year = "2018", abstract = "Abstract: This paper presents a micro Fourier transform infrared spectrometer (μFTIR), enabled by an innovative H-shaped electrothermal microelectromechanical systems (MEMS) mirror. The H-shaped MEMS mirror consists of 32 symmetrically-distributed three-level ladder bi-layer actuators, leading to large linear displacement with negligible tilting. A special driving method was developed for obtaining a linear, uniform-speed motion of 186 μm and the tilting angle of the MEMS mirror was as small as 0.06°, so there was no need of complex closed-loop control. A telecentric lens was employed in the interferometer of the μFTIR to reduce the influence of the MEMS mirror tilting effect. Also, a new phase interpolation algorithm, instead of the traditional fringe interval method, was applied in the process of the spectral reconstruction to improve the spectral stability. Finally, the new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure grain moisture, protein and fat contents.", journal = "Optics Express", title = "Review of the article “Micro Fourier transform infrared spectrometer based on an electrothermal MEMS mirror”, verified by Publons, Web of Science", pages = "10-1/326828", url = "https://hdl.handle.net/21.15107/rcub_machinery_6184" }
Jovanović, T.. (2018). Review of the article “Micro Fourier transform infrared spectrometer based on an electrothermal MEMS mirror”, verified by Publons, Web of Science. in Optics Express, 1/326828-10. https://hdl.handle.net/21.15107/rcub_machinery_6184
Jovanović T. Review of the article “Micro Fourier transform infrared spectrometer based on an electrothermal MEMS mirror”, verified by Publons, Web of Science. in Optics Express. 2018;:1/326828-10. https://hdl.handle.net/21.15107/rcub_machinery_6184 .
Jovanović, Tamara, "Review of the article “Micro Fourier transform infrared spectrometer based on an electrothermal MEMS mirror”, verified by Publons, Web of Science" in Optics Express (2018):1/326828-10, https://hdl.handle.net/21.15107/rcub_machinery_6184 .