Piezootporna sonda za merenje brzine u jednodimenzijskom nestišljivom strujanju
Piezoresistant probe for measurement of velocity in one-dimensional incompressible flow
Апстракт
Radeći na problemu kalibracije sondi sa zagrejanim vlaknima u okviru rada [3], javila se potreba za sondom kojom se može meriti trenutna brzina u jednodimenzijskom vazdušnom mlazu. Ubrzo potom na Mašinskom fakultetu u Beogradu je razrađena ideja o prvoj domaćoj piezorezistivnoj sondi kojom se meri trenutni diferencijalni pritisak. Sonda je realizovana u saradnji sa IHTM, Centrom za mikroelektronske tehnologije i monokristale. Probna ispitivanja su pokazala da se sonda može uspešno koristiti za merenje trenutne brzine jednodimenzijskog nestišljivog strujanja. U tom smislu je posle prvenac sonde napravljeno još nekoliko sličnih sondi. U radu su dati osnovni elementi tehnološkog postupka za dobijanje senzora pritiska. Pored detaljnog opisa senzorskog čipa ovde su prikazani i drugi elementi sonde JR-p. Pre svakog merenja sondom ona mora da se baždari. Sonda JR-p se baždari statički i u kvazistacionarnom vazdušnom mlazu. Ovde su prikazani rezultati jednog takvog baždarenja.
Working on the problem of calibration of hot wire probes within (3), we came to the need to have a probe for measuring the instantaneous velocity in a one-dimensional air jet. Soon after the idea concerned with the first domestic piezoresistant probe by means of which the instantaneous differential pressure can be measured was developed on the Faculty of Mechanical Engineering. The probe was realized in the collaboration with IHTM, the Center for microelectronic technology and monocrystals. First tests with the probe showed that it could be successfully used for measuring the instantaneous velocity in one-dimensional incompressible flows. In that sense, some more similar probes were produced after the pioneering one. In this paper the basic elements of the technological procedure for the production of the pressure sensor are given. In addition to a detailed description of the sensor chip we show here some other elements of the probe JR-p also. Before any use the probe must be calibrate...d. The probe JR-p is calibrated statically in a quasi-steady air jet. The results of such a calibration are presented here.
Кључне речи:
velocity / piezoresistant probe / measurement / differential pressureИзвор:
FME Transactions, 2004, 32, 1, 25-30Издавач:
- Univerzitet u Beogradu - Mašinski fakultet, Beograd
Колекције
Институција/група
Mašinski fakultetTY - JOUR AU - Lečić, Milan AU - Jankov, Rade AU - Popović, Slobodan AU - Matić, Milan PY - 2004 UR - https://machinery.mas.bg.ac.rs/handle/123456789/421 AB - Radeći na problemu kalibracije sondi sa zagrejanim vlaknima u okviru rada [3], javila se potreba za sondom kojom se može meriti trenutna brzina u jednodimenzijskom vazdušnom mlazu. Ubrzo potom na Mašinskom fakultetu u Beogradu je razrađena ideja o prvoj domaćoj piezorezistivnoj sondi kojom se meri trenutni diferencijalni pritisak. Sonda je realizovana u saradnji sa IHTM, Centrom za mikroelektronske tehnologije i monokristale. Probna ispitivanja su pokazala da se sonda može uspešno koristiti za merenje trenutne brzine jednodimenzijskog nestišljivog strujanja. U tom smislu je posle prvenac sonde napravljeno još nekoliko sličnih sondi. U radu su dati osnovni elementi tehnološkog postupka za dobijanje senzora pritiska. Pored detaljnog opisa senzorskog čipa ovde su prikazani i drugi elementi sonde JR-p. Pre svakog merenja sondom ona mora da se baždari. Sonda JR-p se baždari statički i u kvazistacionarnom vazdušnom mlazu. Ovde su prikazani rezultati jednog takvog baždarenja. AB - Working on the problem of calibration of hot wire probes within (3), we came to the need to have a probe for measuring the instantaneous velocity in a one-dimensional air jet. Soon after the idea concerned with the first domestic piezoresistant probe by means of which the instantaneous differential pressure can be measured was developed on the Faculty of Mechanical Engineering. The probe was realized in the collaboration with IHTM, the Center for microelectronic technology and monocrystals. First tests with the probe showed that it could be successfully used for measuring the instantaneous velocity in one-dimensional incompressible flows. In that sense, some more similar probes were produced after the pioneering one. In this paper the basic elements of the technological procedure for the production of the pressure sensor are given. In addition to a detailed description of the sensor chip we show here some other elements of the probe JR-p also. Before any use the probe must be calibrated. The probe JR-p is calibrated statically in a quasi-steady air jet. The results of such a calibration are presented here. PB - Univerzitet u Beogradu - Mašinski fakultet, Beograd T2 - FME Transactions T1 - Piezootporna sonda za merenje brzine u jednodimenzijskom nestišljivom strujanju T1 - Piezoresistant probe for measurement of velocity in one-dimensional incompressible flow EP - 30 IS - 1 SP - 25 VL - 32 UR - https://hdl.handle.net/21.15107/rcub_machinery_421 ER -
@article{ author = "Lečić, Milan and Jankov, Rade and Popović, Slobodan and Matić, Milan", year = "2004", abstract = "Radeći na problemu kalibracije sondi sa zagrejanim vlaknima u okviru rada [3], javila se potreba za sondom kojom se može meriti trenutna brzina u jednodimenzijskom vazdušnom mlazu. Ubrzo potom na Mašinskom fakultetu u Beogradu je razrađena ideja o prvoj domaćoj piezorezistivnoj sondi kojom se meri trenutni diferencijalni pritisak. Sonda je realizovana u saradnji sa IHTM, Centrom za mikroelektronske tehnologije i monokristale. Probna ispitivanja su pokazala da se sonda može uspešno koristiti za merenje trenutne brzine jednodimenzijskog nestišljivog strujanja. U tom smislu je posle prvenac sonde napravljeno još nekoliko sličnih sondi. U radu su dati osnovni elementi tehnološkog postupka za dobijanje senzora pritiska. Pored detaljnog opisa senzorskog čipa ovde su prikazani i drugi elementi sonde JR-p. Pre svakog merenja sondom ona mora da se baždari. Sonda JR-p se baždari statički i u kvazistacionarnom vazdušnom mlazu. Ovde su prikazani rezultati jednog takvog baždarenja., Working on the problem of calibration of hot wire probes within (3), we came to the need to have a probe for measuring the instantaneous velocity in a one-dimensional air jet. Soon after the idea concerned with the first domestic piezoresistant probe by means of which the instantaneous differential pressure can be measured was developed on the Faculty of Mechanical Engineering. The probe was realized in the collaboration with IHTM, the Center for microelectronic technology and monocrystals. First tests with the probe showed that it could be successfully used for measuring the instantaneous velocity in one-dimensional incompressible flows. In that sense, some more similar probes were produced after the pioneering one. In this paper the basic elements of the technological procedure for the production of the pressure sensor are given. In addition to a detailed description of the sensor chip we show here some other elements of the probe JR-p also. Before any use the probe must be calibrated. The probe JR-p is calibrated statically in a quasi-steady air jet. The results of such a calibration are presented here.", publisher = "Univerzitet u Beogradu - Mašinski fakultet, Beograd", journal = "FME Transactions", title = "Piezootporna sonda za merenje brzine u jednodimenzijskom nestišljivom strujanju, Piezoresistant probe for measurement of velocity in one-dimensional incompressible flow", pages = "30-25", number = "1", volume = "32", url = "https://hdl.handle.net/21.15107/rcub_machinery_421" }
Lečić, M., Jankov, R., Popović, S.,& Matić, M.. (2004). Piezootporna sonda za merenje brzine u jednodimenzijskom nestišljivom strujanju. in FME Transactions Univerzitet u Beogradu - Mašinski fakultet, Beograd., 32(1), 25-30. https://hdl.handle.net/21.15107/rcub_machinery_421
Lečić M, Jankov R, Popović S, Matić M. Piezootporna sonda za merenje brzine u jednodimenzijskom nestišljivom strujanju. in FME Transactions. 2004;32(1):25-30. https://hdl.handle.net/21.15107/rcub_machinery_421 .
Lečić, Milan, Jankov, Rade, Popović, Slobodan, Matić, Milan, "Piezootporna sonda za merenje brzine u jednodimenzijskom nestišljivom strujanju" in FME Transactions, 32, no. 1 (2004):25-30, https://hdl.handle.net/21.15107/rcub_machinery_421 .