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dc.creatorVeljković, Sandra
dc.creatorMitić, Vojislav V.
dc.creatorPaunović, Vesna
dc.creatorLazović, Goran
dc.creatorMohr, Markus
dc.creatorFecht, Hans
dc.date.accessioned2022-09-19T19:10:35Z
dc.date.available2022-09-19T19:10:35Z
dc.date.issued2020
dc.identifier.issn1451-4869
dc.identifier.urihttps://machinery.mas.bg.ac.rs/handle/123456789/3456
dc.description.abstractThere is a progressing interests for polycrystalline diamonds and they have been more extensively used recently. This area has been intensively researched due to the outstanding potential of this material, and this necessitated presenting some of the latest application related to engineering in this paper. A better insight of polycrystalline diamonds properties can be achieved by intensively researching the surface structure. Samples of nanocrystalline diamonds grown by the chemical vapor deposition method are analyzed and accordingly, the focus of the research was the surface parameters and their structure. It is observed that waviness and texture are unique for any direction, their values are almost the same for the chosen directions and they vary approximately from -0.2 nm to 0.4 nm. Analyses of the parameters allowed a more detailed insight into the morphology of the surfaces of polycrystalline films.en
dc.publisherUniverzitet u Kragujevcu - Fakultet tehničkih nauka, Čačak
dc.relationinfo:eu-repo/grantAgreement/MESTD/Basic Research (BR or ON)/172057/RS//
dc.relationThis paper is realized in cooperation with the Institute of Functional Nanosystems, University of Ulm, in Germany and the Laboratory for Electron Microscopy, University of Niš
dc.rightsopenAccess
dc.rights.urihttps://creativecommons.org/licenses/by-nc-nd/4.0/
dc.sourceSerbian Journal of Electrical Engineering
dc.subjectSurface propertiesen
dc.subjectPolycrystalline diamondsen
dc.subjectMicroelectronic devicesen
dc.subjectMEMSen
dc.titleAnalyses of the surface parameters in polycrystalline diamondsen
dc.typearticle
dc.rights.licenseBY-NC-ND
dc.citation.epage129
dc.citation.issue1
dc.citation.other17(1): 111-129
dc.citation.rankM52
dc.citation.spage111
dc.citation.volume17
dc.identifier.doi10.2298/SJEE2001111V
dc.identifier.fulltexthttp://machinery.mas.bg.ac.rs/bitstream/id/2052/3453.pdf
dc.identifier.scopus2-s2.0-85084129332
dc.type.versionpublishedVersion


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