Analyses of the surface parameters in polycrystalline diamonds
Апстракт
There is a progressing interests for polycrystalline diamonds and they have been more extensively used recently. This area has been intensively researched due to the outstanding potential of this material, and this necessitated presenting some of the latest application related to engineering in this paper. A better insight of polycrystalline diamonds properties can be achieved by intensively researching the surface structure. Samples of nanocrystalline diamonds grown by the chemical vapor deposition method are analyzed and accordingly, the focus of the research was the surface parameters and their structure. It is observed that waviness and texture are unique for any direction, their values are almost the same for the chosen directions and they vary approximately from -0.2 nm to 0.4 nm. Analyses of the parameters allowed a more detailed insight into the morphology of the surfaces of polycrystalline films.
Кључне речи:
Surface properties / Polycrystalline diamonds / Microelectronic devices / MEMSИзвор:
Serbian Journal of Electrical Engineering, 2020, 17, 1, 111-129Издавач:
- Univerzitet u Kragujevcu - Fakultet tehničkih nauka, Čačak
Финансирање / пројекти:
- Усмерена синтеза, структура и својства мултифункционалних материјала (RS-172057)
- This paper is realized in cooperation with the Institute of Functional Nanosystems, University of Ulm, in Germany and the Laboratory for Electron Microscopy, University of Niš
Колекције
Институција/група
Mašinski fakultetTY - JOUR AU - Veljković, Sandra AU - Mitić, Vojislav V. AU - Paunović, Vesna AU - Lazović, Goran AU - Mohr, Markus AU - Fecht, Hans PY - 2020 UR - https://machinery.mas.bg.ac.rs/handle/123456789/3456 AB - There is a progressing interests for polycrystalline diamonds and they have been more extensively used recently. This area has been intensively researched due to the outstanding potential of this material, and this necessitated presenting some of the latest application related to engineering in this paper. A better insight of polycrystalline diamonds properties can be achieved by intensively researching the surface structure. Samples of nanocrystalline diamonds grown by the chemical vapor deposition method are analyzed and accordingly, the focus of the research was the surface parameters and their structure. It is observed that waviness and texture are unique for any direction, their values are almost the same for the chosen directions and they vary approximately from -0.2 nm to 0.4 nm. Analyses of the parameters allowed a more detailed insight into the morphology of the surfaces of polycrystalline films. PB - Univerzitet u Kragujevcu - Fakultet tehničkih nauka, Čačak T2 - Serbian Journal of Electrical Engineering T1 - Analyses of the surface parameters in polycrystalline diamonds EP - 129 IS - 1 SP - 111 VL - 17 DO - 10.2298/SJEE2001111V ER -
@article{ author = "Veljković, Sandra and Mitić, Vojislav V. and Paunović, Vesna and Lazović, Goran and Mohr, Markus and Fecht, Hans", year = "2020", abstract = "There is a progressing interests for polycrystalline diamonds and they have been more extensively used recently. This area has been intensively researched due to the outstanding potential of this material, and this necessitated presenting some of the latest application related to engineering in this paper. A better insight of polycrystalline diamonds properties can be achieved by intensively researching the surface structure. Samples of nanocrystalline diamonds grown by the chemical vapor deposition method are analyzed and accordingly, the focus of the research was the surface parameters and their structure. It is observed that waviness and texture are unique for any direction, their values are almost the same for the chosen directions and they vary approximately from -0.2 nm to 0.4 nm. Analyses of the parameters allowed a more detailed insight into the morphology of the surfaces of polycrystalline films.", publisher = "Univerzitet u Kragujevcu - Fakultet tehničkih nauka, Čačak", journal = "Serbian Journal of Electrical Engineering", title = "Analyses of the surface parameters in polycrystalline diamonds", pages = "129-111", number = "1", volume = "17", doi = "10.2298/SJEE2001111V" }
Veljković, S., Mitić, V. V., Paunović, V., Lazović, G., Mohr, M.,& Fecht, H.. (2020). Analyses of the surface parameters in polycrystalline diamonds. in Serbian Journal of Electrical Engineering Univerzitet u Kragujevcu - Fakultet tehničkih nauka, Čačak., 17(1), 111-129. https://doi.org/10.2298/SJEE2001111V
Veljković S, Mitić VV, Paunović V, Lazović G, Mohr M, Fecht H. Analyses of the surface parameters in polycrystalline diamonds. in Serbian Journal of Electrical Engineering. 2020;17(1):111-129. doi:10.2298/SJEE2001111V .
Veljković, Sandra, Mitić, Vojislav V., Paunović, Vesna, Lazović, Goran, Mohr, Markus, Fecht, Hans, "Analyses of the surface parameters in polycrystalline diamonds" in Serbian Journal of Electrical Engineering, 17, no. 1 (2020):111-129, https://doi.org/10.2298/SJEE2001111V . .