Uloga pritiska u transportu F- jona u gasu bor-trifluorida u tehnološkim primenama

Abstract

U ovom radu predstavili smo transportne parametre dobijene za F- jone u molekularnom gasu BF3 neophodne za formiranje globalnih modela za kompleksne sudarne plazme. Novi rezultati za set preseka i dobijeni transportni koeficijenti za F- jone u BF3 koji se mogu koristiti u takvim modelima su predstavljeni. Prvo smo koristili Nanbu teoriju za određivanje preseka binarnih sudara F- jona sa molekulima BF3. Presek za sudar tri tela uključuje egzotermni binarni presek normiran na izabrani pritisak. Koristili smo Monte Karlo metodu za dobijanje transportnih parametara na temperaturi od T = 295 K i pritisaku od 133.32 Pa (1 Torr).

In this work we present swarm data obtained for F- ions in molecular gas BF3 necessary to form the global models for the complex collisional plasmas. The new results for scattering cross section set and proposed transport coefficients for F- ions in BF3 that can be used in such models are presented. First we used Nanbu's theory based on thermodynamic threshold energies to calculate cross sections for binary collisions of Fions with BF3 molecules. Cross section for three body association reaction is included by using exothermic cross section for binary reaction normalized at selected pressure. Monte Carlo method is used to obtain swarm parameters at temperature of T=295 K and pressure of 133.32 Pa (1 Torr).