Uloga pritiska u transportu F- jona u gasu bor-trifluorida u tehnološkim primenama
Role of pressure in transport of F- ions in BF3 gas for technological applications
2015
Аутори
Raspopović, Zoran M.Stojanović, Vladimir D.
Cvelbar, Uroš
Nikitović, Željka D.
Jovanović, Jasmina
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
U ovom radu predstavili smo transportne parametre dobijene za F- jone u molekularnom gasu BF3 neophodne za formiranje globalnih modela za kompleksne sudarne plazme. Novi rezultati za set preseka i dobijeni transportni koeficijenti za F- jone u BF3 koji se mogu koristiti u takvim modelima su predstavljeni. Prvo smo koristili Nanbu teoriju za određivanje preseka binarnih sudara F- jona sa molekulima BF3. Presek za sudar tri tela uključuje egzotermni binarni presek normiran na izabrani pritisak. Koristili smo Monte Karlo metodu za dobijanje transportnih parametara na temperaturi od T = 295 K i pritisaku od 133.32 Pa (1 Torr).
In this work we present swarm data obtained for F- ions in molecular gas BF3 necessary to form the global models for the complex collisional plasmas. The new results for scattering cross section set and proposed transport coefficients for F- ions in BF3 that can be used in such models are presented. First we used Nanbu's theory based on thermodynamic threshold energies to calculate cross sections for binary collisions of Fions with BF3 molecules. Cross section for three body association reaction is included by using exothermic cross section for binary reaction normalized at selected pressure. Monte Carlo method is used to obtain swarm parameters at temperature of T=295 K and pressure of 133.32 Pa (1 Torr).
Кључне речи:
transport coefficients / three body rate coefficient / Negative ions / Monte Carlo / Global model / F- ion / cross section set / BF3 gas / association reactionИзвор:
FME Transactions, 2015, 43, 2, 168-172Издавач:
- Univerzitet u Beogradu - Mašinski fakultet, Beograd
Финансирање / пројекти:
- Фундаментални процеси и примене транспорта честица у неравнотежним плазмама, траповима и наноструктурама (RS-MESTD-Basic Research (BR or ON)-171037)
- Bilateral project 'Meritve plazemskih parametrov v kapacitivnih in induktivnih RF razelektritvah' (410011)
Колекције
Институција/група
Mašinski fakultetTY - JOUR AU - Raspopović, Zoran M. AU - Stojanović, Vladimir D. AU - Cvelbar, Uroš AU - Nikitović, Željka D. AU - Jovanović, Jasmina PY - 2015 UR - https://machinery.mas.bg.ac.rs/handle/123456789/2148 AB - U ovom radu predstavili smo transportne parametre dobijene za F- jone u molekularnom gasu BF3 neophodne za formiranje globalnih modela za kompleksne sudarne plazme. Novi rezultati za set preseka i dobijeni transportni koeficijenti za F- jone u BF3 koji se mogu koristiti u takvim modelima su predstavljeni. Prvo smo koristili Nanbu teoriju za određivanje preseka binarnih sudara F- jona sa molekulima BF3. Presek za sudar tri tela uključuje egzotermni binarni presek normiran na izabrani pritisak. Koristili smo Monte Karlo metodu za dobijanje transportnih parametara na temperaturi od T = 295 K i pritisaku od 133.32 Pa (1 Torr). AB - In this work we present swarm data obtained for F- ions in molecular gas BF3 necessary to form the global models for the complex collisional plasmas. The new results for scattering cross section set and proposed transport coefficients for F- ions in BF3 that can be used in such models are presented. First we used Nanbu's theory based on thermodynamic threshold energies to calculate cross sections for binary collisions of Fions with BF3 molecules. Cross section for three body association reaction is included by using exothermic cross section for binary reaction normalized at selected pressure. Monte Carlo method is used to obtain swarm parameters at temperature of T=295 K and pressure of 133.32 Pa (1 Torr). PB - Univerzitet u Beogradu - Mašinski fakultet, Beograd T2 - FME Transactions T1 - Uloga pritiska u transportu F- jona u gasu bor-trifluorida u tehnološkim primenama T1 - Role of pressure in transport of F- ions in BF3 gas for technological applications EP - 172 IS - 2 SP - 168 VL - 43 DO - 10.5937/fmet1502168R ER -
@article{ author = "Raspopović, Zoran M. and Stojanović, Vladimir D. and Cvelbar, Uroš and Nikitović, Željka D. and Jovanović, Jasmina", year = "2015", abstract = "U ovom radu predstavili smo transportne parametre dobijene za F- jone u molekularnom gasu BF3 neophodne za formiranje globalnih modela za kompleksne sudarne plazme. Novi rezultati za set preseka i dobijeni transportni koeficijenti za F- jone u BF3 koji se mogu koristiti u takvim modelima su predstavljeni. Prvo smo koristili Nanbu teoriju za određivanje preseka binarnih sudara F- jona sa molekulima BF3. Presek za sudar tri tela uključuje egzotermni binarni presek normiran na izabrani pritisak. Koristili smo Monte Karlo metodu za dobijanje transportnih parametara na temperaturi od T = 295 K i pritisaku od 133.32 Pa (1 Torr)., In this work we present swarm data obtained for F- ions in molecular gas BF3 necessary to form the global models for the complex collisional plasmas. The new results for scattering cross section set and proposed transport coefficients for F- ions in BF3 that can be used in such models are presented. First we used Nanbu's theory based on thermodynamic threshold energies to calculate cross sections for binary collisions of Fions with BF3 molecules. Cross section for three body association reaction is included by using exothermic cross section for binary reaction normalized at selected pressure. Monte Carlo method is used to obtain swarm parameters at temperature of T=295 K and pressure of 133.32 Pa (1 Torr).", publisher = "Univerzitet u Beogradu - Mašinski fakultet, Beograd", journal = "FME Transactions", title = "Uloga pritiska u transportu F- jona u gasu bor-trifluorida u tehnološkim primenama, Role of pressure in transport of F- ions in BF3 gas for technological applications", pages = "172-168", number = "2", volume = "43", doi = "10.5937/fmet1502168R" }
Raspopović, Z. M., Stojanović, V. D., Cvelbar, U., Nikitović, Ž. D.,& Jovanović, J.. (2015). Uloga pritiska u transportu F- jona u gasu bor-trifluorida u tehnološkim primenama. in FME Transactions Univerzitet u Beogradu - Mašinski fakultet, Beograd., 43(2), 168-172. https://doi.org/10.5937/fmet1502168R
Raspopović ZM, Stojanović VD, Cvelbar U, Nikitović ŽD, Jovanović J. Uloga pritiska u transportu F- jona u gasu bor-trifluorida u tehnološkim primenama. in FME Transactions. 2015;43(2):168-172. doi:10.5937/fmet1502168R .
Raspopović, Zoran M., Stojanović, Vladimir D., Cvelbar, Uroš, Nikitović, Željka D., Jovanović, Jasmina, "Uloga pritiska u transportu F- jona u gasu bor-trifluorida u tehnološkim primenama" in FME Transactions, 43, no. 2 (2015):168-172, https://doi.org/10.5937/fmet1502168R . .