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Cross sections and transport properties of positive ions in BF3 plasmas
| dc.creator | Stojanović, Vladimir D. | |
| dc.creator | Raspopović, Zoran M. | |
| dc.creator | Jovanović, Jasmina | |
| dc.creator | Radovanov, S. B. | |
| dc.creator | Nikitović, Željka D. | |
| dc.creator | Petrović, Z. Lj. | |
| dc.date.accessioned | 2022-09-19T16:53:44Z | |
| dc.date.available | 2022-09-19T16:53:44Z | |
| dc.date.issued | 2012 | |
| dc.identifier.issn | 0168-583X | |
| dc.identifier.uri | https://machinery.mas.bg.ac.rs/handle/123456789/1441 | |
| dc.description.abstract | Boron produced in plasma devices continues to be the main p-type dopant in ion implantation of semiconductor devices. Yet plasma parameters of most frequently used Boron rich gas, BF3, are not well established. Time resolved measurements of ion energy distributions in the cathode boundary [1] of a pulsed dc plasma doping system revealed possible role of the charge-transfer collisions between singly charged ions of various mass. The cross sections for scattering of B+, BF+ and BF2+ ions on BF3 molecule are calculated by using Nanbu's theory [2] separating elastic from reactive collisions. A Monte Carlo simulation technique was applied to perform calculations of transport parameters in DC electric fields. | en |
| dc.publisher | Elsevier Science Bv, Amsterdam | |
| dc.relation | info:eu-repo/grantAgreement/MESTD/Integrated and Interdisciplinary Research (IIR or III)/41011/RS// | |
| dc.relation | info:eu-repo/grantAgreement/MESTD/Basic Research (BR or ON)/171037/RS// | |
| dc.rights | restrictedAccess | |
| dc.source | Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Ato | |
| dc.subject | Transport coefficients | en |
| dc.subject | Positive ions | en |
| dc.subject | Plasma | en |
| dc.subject | Non-conservative collisions | en |
| dc.subject | Monte Carlo | en |
| dc.subject | Cross section | en |
| dc.subject | BF3 | en |
| dc.title | Cross sections and transport properties of positive ions in BF3 plasmas | en |
| dc.type | article | |
| dc.rights.license | ARR | |
| dc.citation.epage | 154 | |
| dc.citation.other | 279: 151-154 | |
| dc.citation.rank | M21 | |
| dc.citation.spage | 151 | |
| dc.citation.volume | 279 | |
| dc.identifier.doi | 10.1016/j.nimb.2011.10.052 | |
| dc.identifier.scopus | 2-s2.0-84859600079 | |
| dc.identifier.wos | 000303637500036 | |
| dc.type.version | publishedVersion |
