The influence of excited states on the kinetics of excitation and dissociation in gas mixtures containing methane
Samo za registrovane korisnike
1995
Autori
Jelenak, A.Jovanović, Jasmina
Bzenić, S.A.
Vrhovac, S.B.
Manola, S.S.
Tomčik, B.
Petrović, Z. Lj.
Članak u časopisu (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
In this paper, we extend the calculations for rare gas discharges, which aim to establish the influence of excited states on the kinetics of electron-induced excitation, to rare gas-methane mixtures and pure methane which are often used in diamond-like film deposition. In particular, we address the effect of non-thermal vibrational populations on the rate coefficients in methane-containing gas discharges using the procedure applied previously for pure silane. Furthermore, we investigate the kinetics of electronically excited levels of rare gases and methane in the presence of a significant population of excited states. These states may contribute to the overall ionization, excitation and dissociation rates through stepwise processes, superelastic collisions and energy transfer processes. The influence of superelastic processes on the development of the negative differential conductivity (NDC) is discussed on the basis of the momentum transfer theory, and it is shown that the NDC is red...uced when significant populations of excited states are present. This is of importance for calculations of the transport coefficients for a.c. electric fields where NDC leads to a complex temporal dependence of the drift velocity and thus directly affects the power deposition in the discharge. Finally, we present the rate and transport coefficients calculated for methane in r.f. fields based on the Monte Carlo simulation for time-dependent fields. A good agreement with the effective field approximation and earlier Boltzmann calculations is found.
Ključne reči:
Diamond-like filmsIzvor:
Diamond and Related Materials, 1995, 4, 9, 1103-1112Finansiranje / projekti:
- Partial funding for this work was supplied by the Ministry of Sciencea nd Developmento f the Republic of Serbia. The authors are indebted to Professor T. Makabe and Dr. F. Tochikubo of KEIO University for usefulc ommentsa nd collaboration on relatedp roje
Kolekcije
Institucija/grupa
Mašinski fakultetTY - JOUR AU - Jelenak, A. AU - Jovanović, Jasmina AU - Bzenić, S.A. AU - Vrhovac, S.B. AU - Manola, S.S. AU - Tomčik, B. AU - Petrović, Z. Lj. PY - 1995 UR - https://machinery.mas.bg.ac.rs/handle/123456789/124 AB - In this paper, we extend the calculations for rare gas discharges, which aim to establish the influence of excited states on the kinetics of electron-induced excitation, to rare gas-methane mixtures and pure methane which are often used in diamond-like film deposition. In particular, we address the effect of non-thermal vibrational populations on the rate coefficients in methane-containing gas discharges using the procedure applied previously for pure silane. Furthermore, we investigate the kinetics of electronically excited levels of rare gases and methane in the presence of a significant population of excited states. These states may contribute to the overall ionization, excitation and dissociation rates through stepwise processes, superelastic collisions and energy transfer processes. The influence of superelastic processes on the development of the negative differential conductivity (NDC) is discussed on the basis of the momentum transfer theory, and it is shown that the NDC is reduced when significant populations of excited states are present. This is of importance for calculations of the transport coefficients for a.c. electric fields where NDC leads to a complex temporal dependence of the drift velocity and thus directly affects the power deposition in the discharge. Finally, we present the rate and transport coefficients calculated for methane in r.f. fields based on the Monte Carlo simulation for time-dependent fields. A good agreement with the effective field approximation and earlier Boltzmann calculations is found. T2 - Diamond and Related Materials T1 - The influence of excited states on the kinetics of excitation and dissociation in gas mixtures containing methane EP - 1112 IS - 9 SP - 1103 VL - 4 DO - 10.1016/0925-9635(95)00279-0 ER -
@article{ author = "Jelenak, A. and Jovanović, Jasmina and Bzenić, S.A. and Vrhovac, S.B. and Manola, S.S. and Tomčik, B. and Petrović, Z. Lj.", year = "1995", abstract = "In this paper, we extend the calculations for rare gas discharges, which aim to establish the influence of excited states on the kinetics of electron-induced excitation, to rare gas-methane mixtures and pure methane which are often used in diamond-like film deposition. In particular, we address the effect of non-thermal vibrational populations on the rate coefficients in methane-containing gas discharges using the procedure applied previously for pure silane. Furthermore, we investigate the kinetics of electronically excited levels of rare gases and methane in the presence of a significant population of excited states. These states may contribute to the overall ionization, excitation and dissociation rates through stepwise processes, superelastic collisions and energy transfer processes. The influence of superelastic processes on the development of the negative differential conductivity (NDC) is discussed on the basis of the momentum transfer theory, and it is shown that the NDC is reduced when significant populations of excited states are present. This is of importance for calculations of the transport coefficients for a.c. electric fields where NDC leads to a complex temporal dependence of the drift velocity and thus directly affects the power deposition in the discharge. Finally, we present the rate and transport coefficients calculated for methane in r.f. fields based on the Monte Carlo simulation for time-dependent fields. A good agreement with the effective field approximation and earlier Boltzmann calculations is found.", journal = "Diamond and Related Materials", title = "The influence of excited states on the kinetics of excitation and dissociation in gas mixtures containing methane", pages = "1112-1103", number = "9", volume = "4", doi = "10.1016/0925-9635(95)00279-0" }
Jelenak, A., Jovanović, J., Bzenić, S.A., Vrhovac, S.B., Manola, S.S., Tomčik, B.,& Petrović, Z. Lj.. (1995). The influence of excited states on the kinetics of excitation and dissociation in gas mixtures containing methane. in Diamond and Related Materials, 4(9), 1103-1112. https://doi.org/10.1016/0925-9635(95)00279-0
Jelenak A, Jovanović J, Bzenić S, Vrhovac S, Manola S, Tomčik B, Petrović ZL. The influence of excited states on the kinetics of excitation and dissociation in gas mixtures containing methane. in Diamond and Related Materials. 1995;4(9):1103-1112. doi:10.1016/0925-9635(95)00279-0 .
Jelenak, A., Jovanović, Jasmina, Bzenić, S.A., Vrhovac, S.B., Manola, S.S., Tomčik, B., Petrović, Z. Lj., "The influence of excited states on the kinetics of excitation and dissociation in gas mixtures containing methane" in Diamond and Related Materials, 4, no. 9 (1995):1103-1112, https://doi.org/10.1016/0925-9635(95)00279-0 . .