Cross sections and transport properties of positive ions in BF3 plasmas
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2012
Authors
Stojanović, Vladimir D.Raspopović, Zoran M.
Jovanović, Jasmina
Radovanov, S. B.
Nikitović, Željka D.
Petrović, Z. Lj.
Article (Published version)
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Show full item recordAbstract
Boron produced in plasma devices continues to be the main p-type dopant in ion implantation of semiconductor devices. Yet plasma parameters of most frequently used Boron rich gas, BF3, are not well established. Time resolved measurements of ion energy distributions in the cathode boundary [1] of a pulsed dc plasma doping system revealed possible role of the charge-transfer collisions between singly charged ions of various mass. The cross sections for scattering of B+, BF+ and BF2+ ions on BF3 molecule are calculated by using Nanbu's theory [2] separating elastic from reactive collisions. A Monte Carlo simulation technique was applied to perform calculations of transport parameters in DC electric fields.
Keywords:
Transport coefficients / Positive ions / Plasma / Non-conservative collisions / Monte Carlo / Cross section / BF3Source:
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Ato, 2012, 279, 151-154Publisher:
- Elsevier Science Bv, Amsterdam
Funding / projects:
- Application of low temperature plasmas in biomedicine, environmental protection and nanotechnologies (RS-MESTD-Integrated and Interdisciplinary Research (IIR or III)-41011)
- Fundamental processes and applications of particle transport in non-equilibrium plasmas, traps and nanostructures (RS-MESTD-Basic Research (BR or ON)-171037)
DOI: 10.1016/j.nimb.2011.10.052
ISSN: 0168-583X
WoS: 000303637500036
Scopus: 2-s2.0-84859600079
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Institution/Community
Mašinski fakultetTY - JOUR AU - Stojanović, Vladimir D. AU - Raspopović, Zoran M. AU - Jovanović, Jasmina AU - Radovanov, S. B. AU - Nikitović, Željka D. AU - Petrović, Z. Lj. PY - 2012 UR - https://machinery.mas.bg.ac.rs/handle/123456789/1441 AB - Boron produced in plasma devices continues to be the main p-type dopant in ion implantation of semiconductor devices. Yet plasma parameters of most frequently used Boron rich gas, BF3, are not well established. Time resolved measurements of ion energy distributions in the cathode boundary [1] of a pulsed dc plasma doping system revealed possible role of the charge-transfer collisions between singly charged ions of various mass. The cross sections for scattering of B+, BF+ and BF2+ ions on BF3 molecule are calculated by using Nanbu's theory [2] separating elastic from reactive collisions. A Monte Carlo simulation technique was applied to perform calculations of transport parameters in DC electric fields. PB - Elsevier Science Bv, Amsterdam T2 - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Ato T1 - Cross sections and transport properties of positive ions in BF3 plasmas EP - 154 SP - 151 VL - 279 DO - 10.1016/j.nimb.2011.10.052 ER -
@article{ author = "Stojanović, Vladimir D. and Raspopović, Zoran M. and Jovanović, Jasmina and Radovanov, S. B. and Nikitović, Željka D. and Petrović, Z. Lj.", year = "2012", abstract = "Boron produced in plasma devices continues to be the main p-type dopant in ion implantation of semiconductor devices. Yet plasma parameters of most frequently used Boron rich gas, BF3, are not well established. Time resolved measurements of ion energy distributions in the cathode boundary [1] of a pulsed dc plasma doping system revealed possible role of the charge-transfer collisions between singly charged ions of various mass. The cross sections for scattering of B+, BF+ and BF2+ ions on BF3 molecule are calculated by using Nanbu's theory [2] separating elastic from reactive collisions. A Monte Carlo simulation technique was applied to perform calculations of transport parameters in DC electric fields.", publisher = "Elsevier Science Bv, Amsterdam", journal = "Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Ato", title = "Cross sections and transport properties of positive ions in BF3 plasmas", pages = "154-151", volume = "279", doi = "10.1016/j.nimb.2011.10.052" }
Stojanović, V. D., Raspopović, Z. M., Jovanović, J., Radovanov, S. B., Nikitović, Ž. D.,& Petrović, Z. Lj.. (2012). Cross sections and transport properties of positive ions in BF3 plasmas. in Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Ato Elsevier Science Bv, Amsterdam., 279, 151-154. https://doi.org/10.1016/j.nimb.2011.10.052
Stojanović VD, Raspopović ZM, Jovanović J, Radovanov SB, Nikitović ŽD, Petrović ZL. Cross sections and transport properties of positive ions in BF3 plasmas. in Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Ato. 2012;279:151-154. doi:10.1016/j.nimb.2011.10.052 .
Stojanović, Vladimir D., Raspopović, Zoran M., Jovanović, Jasmina, Radovanov, S. B., Nikitović, Željka D., Petrović, Z. Lj., "Cross sections and transport properties of positive ions in BF3 plasmas" in Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Ato, 279 (2012):151-154, https://doi.org/10.1016/j.nimb.2011.10.052 . .